he MECS program has a wide range of fabrication facilities available for both fundamental studies and device development. The primary method used for constructing our mesoscopic structures and devices is microlamination. This method can fabricate micro and meso scale systems having intricate arrays of components interconnected within a single block of metal or polymeric material. The process begins by surface machining, or through cutting, individual laminae with patterns containing the desired structure. The laminae are often shims of a base material having desirable mechanical and thermal properties important to the functioning of the final device. Once the patterns are cut, the shims are surface treated and stacked in a prearranged order. Bonding then takes place forming a single laminate. Some post processing of the final part can be performed to dissociate internal structures if needed. The method is being developed at Oregon State University. Our current practices emphasize laser micromachining of metal and polymeric laminates as well as chemical and electrochemical micromachining. The following provides a brief description of our facilities.

ESI 4420 Laser Micromachining Center

ESI 8000 Laser Micromachining and Micro Welding Center

Thermal Technologies Vacuum Hot Press

Chemical and Electrochemical Micromachining System

Oriel Direct Contact Photolithography Exposure System

Laminar Flow Clean Hood for System Development and Assembly

High Speed 4" Spin Coater

Flow Loop Testing Apparatus

Copyright © 1998-2002 Oregon State University Comments & suggestions:webmaster Page last modified: April 29, 2002 Oregon State University - Web Disclaimer